Sensitive Detection of Local Elasticity by Oscillating an AFM Cantilever with Its Mass Concentrated.

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Study of the flexural sensitivity and resonant frequency of an inclined AFM cantilever with sidewall probe

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ژورنال

عنوان ژورنال: JSME International Journal Series A

سال: 2002

ISSN: 1344-7912,1347-5363

DOI: 10.1299/jsmea.45.567